Particle Filters & Gas Diffusers


Eliminating the contaminants in your process begins by taking a holistic view of the gas delivery path and identifying the threats allows you to implement the right solutions to reduce wafer defects.
Gas filtration, vital to delivering the required purity, has a range of perceptions related to its effective lifetime. Each gas and process step has unique conditions that influence selecting the optimized solution.
© 2021 Rainer Lammertz