In-Line PTFE Gas Filters

Wafergard® MAX HT In-line Gas Filters

Superior particulate filtration for high-temperature, ultrapure gas applications.

Designed for high-temperature TEOS and high-k applications up to 200°C.

Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters

The compact size fits many existing delivery systems and provides design flexibility and versatility

Special baking enables rapid gas delivery startup

Low differential pressure provides stable and improved material delivery

Fitting Size: 1/2"

Fitting Type: Gasket seal

Length: 148,0 mm, 127,0 mm

Wafergard® MAX In-line PTFE Gas Filters

These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.

PTFE filter element excels in ultrapure applications

Designed for high-flow and low-delta pressure applications

For use with inert and reactive gases, including ozone

Pre-conditioned for fast startup (silver only)

Fitting Size: 1/4" 3/8" 1/2"

Fitting Type: Male VCR®, Swagelok®, Butt weld tube

Length: 112,7 mm, 117,9 mm, 118,7 mm, 127,0 mm

Wafergard® MAX-1000 In-line PTFE Gas Filter

These in-line gas filters utilize PTFE membranes supported by PFA structures and 316L stainless steel housings, provide superior particulate filtration in ultrapure gas applications.

Large filtration area with 3x larger filtration, low pressure drop and high flow

Same length dimension as current filter generation allows easy implementation without design changes of gas panel or delivery system

Extended filter lifetime, 3x longer than earlier generation

Fitting Size: 1/2"

Fitting Type: Gasket seal (VCR® compatible) male inlet/outlet, Compression seal (Swagelok® compatible) male inlet/outlet

Length: 127,0 mm, 118,7 mm

Wafergard® II F-1500 In-line Gas Filters

These filters have excellent compatibility with all classes of semiconductor gases and offer high-efficiency particulate filtration.

Fitting Size: 3/8" 1/2" 3/4"

Fitting Type: Butt weld tube Gasket seal

Length: 398 mm, 295 mm, 225 mm

Max Operating Pressure: 18 bar (250 psig) @ 23°C

Wafergard® II F Micro In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.

Fitting Size: 1/4"

Fitting Type: Gasket seal, Butt weld tube

Length: 84,1 mm, 73,7 mm

Max Operating Pressure: 207 bar (3000 psig) @ 23°C