Fast vent diffusers with no introduction or disturbance of particles in process chambers.
ChambergardT fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput.
Chambergard™ FV50D XL Gas Diffuser
Chambergard™ FV50 Gas Diffusers rapidly reduce particles and vent times in load lock and transfer chambers and feature an efficient and robust Ni disk membrane.
Chambergard™ Fast Vent Diffusers
Chambergard™ Fast Vent Diffusers reduce particles and vent times in load lock and transfer chambers. Achieve rapid venting without disturbing or adding particles to wafers.
Chambergard™ BGN Fast Vent Diffuserss
Chambergard™ BGN Fast Vent diffusers deliver high-volume throughput and rapid venting to atmosphere. Patented sintered nickel filter element quickly diffuses the flow of incoming gas.