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Palladium Hydrogen Purifier - PS7-PD1 (50 - 1085 slpm)
Palladium Hydrogen Purifier


  • GaN epitaxy
  • Silicon Carbide (SiC) epitaxy
  • Photovoltaics
  • Polysilicon production
  • Semiconductor
  • Fiber optic processes
  • Fuel cells
The PS7-PD1 includes one Palladium cell in a compact enclosure for a wide range of flows for point-of-use purification for single process tools or bulk gas supply for large LED and semiconductor fabs. A single Palladium cell purifiers the entire gas flow rate. The enclosure is suited for installation near the process tools or in a bulk gas room.

Palladium Membrane Diffusion - How it Works

Purification of hydrogen by palladium (Pd) membrane diffusion is the accepted technology for applications requiring part-per-billion gas purity. Palladium acts as a catalyst, causing hydrogen gas molecules to dissociate into atoms upon contacting the membrane surface. The atoms are small enough to diffuse through the palladium membrane, driven by differential hydrogen pressure across the membrane. The hydrogen atoms recombine into molecules after passing through the membrane. Hydrogen purifiers operate at approximately 400C. At this temperature, only hydrogen atoms readily diffuse through the membranes. No other impurities can diffuse through the palladium membrane.
Impurities including H2O, O2, N2, CO2, CO, hydrocarbons and rare gases remain on the inlet side of the membrane and are continuously purged through a bleed connection. The unique properties of palladium provide a solid barrier with no breakthroughs as compared to catalysts and getters that rely on chemical reactions on reactive surface areas. A nitrogen purge system is included to purge the purifier at startup and during any shutdown.

Palladium Advantages

  • Only Hydrogen passes through to the pure side - the purest gas
  • Every impurity is removed - no exceptions
  • Unlimited lifetime - non-consumable technology
  • Separates pure H2 from source gas with ppm or % level impurities
  • Easy to verify performance with in-situ helium leak test

Key Features

  • Ultra-pure hydrogen from any source
  • < 99.9999999% purity; < 1 ppb total impurities
  • Patented palladium micro-channel technology
  • High flow capacity up to 1085 slpm (70 Nm3/hr)
  • Lowest power consumption
  • Smallest footprint
  • Nitrogen purge system
  • 5.0" Color touchscreen HMI with PLC

Flow Rate
Flow Rate
PS7-PD1-05 77 5
PS7-PD1-10 155 10
PS7-PD1-15 233 15
PS7-PD1-20 311 20
PS7-PD1-25 389 25
PS7-PD1-30 466 30
PS7-PD1-35 544 35
PS7-PD1-40 621 40
PS7-PD1-45 699 45
PS7-PD1-50 776 50
PS7-PD1-55 854 55
PS7-PD1-60 932 60
PS7-PD1-65 1010 65
PS7-PD1-70 1085 70

Palladium Hydrogen Purifier - PS7-PD05 Flow rate 0-50 slpm

Palladium Hydrogen Purifier PS7-PD2 Flow rate 1085 - 2170 slpm

© 2022 Rainer Lammertz