The PS7-PD1 includes one Palladium cell in a compact enclosure for a wide range of flows for point-of-use purification for single process tools or bulk gas supply for large LED and semiconductor fabs. A single Palladium cell purifiers the entire gas flow rate. The enclosure is suited for installation near the process tools or in a bulk gas room.
Palladium Membrane Diffusion - How it Works
Purification of hydrogen by palladium (Pd) membrane diffusion is the accepted technology for applications requiring part-per-billion gas purity. Palladium acts as a catalyst, causing hydrogen gas molecules to dissociate into atoms upon contacting the membrane surface. The atoms are small enough to diffuse through the palladium membrane, driven by differential hydrogen pressure across the membrane. The hydrogen atoms recombine into molecules after passing through the membrane. Hydrogen purifiers operate at approximately 400°C. At this temperature, only hydrogen atoms readily diffuse through the membranes. No other impurities can diffuse through the palladium membrane.
Impurities including H2O, O2, N2, CO2, CO, hydrocarbons and rare gases remain on the inlet side of the membrane and are continuously purged through a bleed connection. The unique properties of palladium provide a solid barrier with no breakthroughs as compared to catalysts and getters that rely on chemical reactions on reactive surface areas. A nitrogen purge system is included to purge the purifier at startup and during any shutdown.
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