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2
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Info:
Technologies
Carbon Dioxide Gas Purifiers
Ambient Temp (MicroTorr Canister Purifier)
H
2
O, CO, CO
2
, Acids, Bases, Organics, Refractory Compound Removal < 1ppb
0 - 1000 slpm
Ambient Temperature (PS31 or PS32 Auto Regen MegaTorr Purifier)
H
2
O, O
2
, Acids, Bases, Organics, Refractory Compound Removal < 1ppb
300+ slpm
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