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Carbon Dioxide Bulk Gas Purifier - PS31 or PS32

The MegaTorr Carbon Dioxide Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS31 and PS32 series uses adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for H2O, O2, Acids, Bases, Organics, and Refractory Compounds are reduced to below parts per billion (ppb) levels.
Dual Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified gas at elevated temperatures.

Standard Features

  • Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • System Alarms
  • Gas to Gas Heat Exchanger
  • Electric Gas Preheaters
  • Closed-Loop Temperature Controls
  • All Metal Cabinet with Doors
  • High Temperature Hardware Interlock
  • Over Pressurization Safety Relief System

Optional Features

  • Inlet & Outlet Isolation Valves
  • Mass flow meter
  • Inlet & Outlet Pressure Transducers
  • Instrument Air Management System
  • Auto or Manual Bypass
  • Ultrafine 0.003 micron Particle Filter
  • Separate Control Power
  • MODBUS Data Communication Port

Gas PurifiedImpurities RemovedOutlet Performance
CO2PS31: H2O, O2, Acids, Bases, Organics, Refractory Compound Removal
PS32: H2O, Acids, Bases, Organics, Refractory Compound Removal
< 1 ppb

© 2021 Rainer Lammertz