MegaTorr PS9 Series Catalytic Nitrogen Purifiers with CH₄ Removal

The Nitrogen MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS9 series uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CH₄, CO, CO₂, H₂, H₂O and O₂ are reduced to below parts per billion (ppb) levels. If CH₄ removal is not required the PS8 Adsorber Only Purifier can be used.

In the PS9 Nitrogen Bulk Gas Purifier, Hydrocarbons (CH₄), CO and H₂ react at elevated temperatures with O₂ or CDA in the oxidizing catalyst vessel to form CO₂ and H₂O which, along with O₂, are then removed in the ambient temperature adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature. The PS9 platform can be manufactured to flow rates from 15 Nm³/hr to 3,000 Nm³/hr.