The Nitrogen PS8 MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS8 series uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels.
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature. The PS8 platform can be manufactured from flow rates of 5 to 20,000 Nm3/hr.