Gases to be purified
Info:
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Rare Gas/Nitrogen/Hydrogen Purification - PS4-MT3/15
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Research has shown that point-of-use gas purification ensures consistent and repeatable process performance. Point-of-Use Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination. Purifiers from SAES provide 99.9999999% purity, which is better than gas from cylinder or liquid sources. MonoTorr PS4 heated getter purifiers provide the most complete removal of impurities for Rare Gases, Nitrogen and Hydrogen. The heated Getter material forms irreversible chemical bonds with any oxide, carbide and nitride impurities. MonoTorr is the only purifier technology capable of removing all Hydrocarbons and Nitrogen from process gases.
Gas purity guarantees are reflected in the chart below.
Other key features:
- Integral inlet/outlet valves and automatic bypass
- Microprocessor control provides added safety and automation
- Protection from exposure to air or oxygen via proprietary safety system
- Patented Life Status Sensor provides early warning for impending breakthrough of impurities
- Replaceable getter cartridge for fast, easy maintenance
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PS4-MT3/15 Performance |
| Gases Purified | Impurities Removed | PS4-MT3 | PS4-MT15 |
| | 0-20 slpm | 20-50 slpm | 0-30 slpm | 30-75 slpm |
| He, Ar | H2O, O2, CO, CO2 | < 1 ppb | < 1 ppb | < 1 ppb | < 1 ppb |
| N2, H2, CH4 | < 1 ppb | < 10 ppb | < 1 ppb | < 10 ppb |
| N2 | H2O, O2, CO, CO2 | < 1 ppb | < 1 ppb | < 1 ppb | < 1 ppb |
| H2, CH4 | < 1 ppb | < 10 ppb | < 1 ppb | < 10 ppb |
| | 0-3 slpm | 0-9 slpm |
| Xe | H2O, O2, CO, CO2, N2, H2, CH4 | < 1 ppb | < 1 ppb |
| | 0-20 slpm | 20-30 slpm | 0-30 slpm | 30-50 slpm |
| H2 | H2O, O2, CO, CO2 | < 1 ppb | < 1 ppb | < 1 ppb | < 1 ppb |
| N2 | < 1 ppb | < 10 ppb | < 1 ppb | < 10 ppb |
Ordering Information |
| Part Number | Description | Power |
| 50 slpm (N2 and Rare Gas), 30 slpm (H2), 3 slpm (Xe) |
| PS4-MT3-R-1 | Rare Gas Purifier | 110-120V |
| PS4-MT3-N-1 | Nitrogen Purifier | 110-120V |
| PS4-MT3-H-1 | Hydrogen Purifier | 110-120V |
| PS4-MT3-R-2 | Rare Gas Purifier | 220-240V |
| PS4-MT3-N-2 | Nitrogen Purifier | 220-240V |
| PS4-MT3-H-2 | Hydrogen Purifier | 220-240V |
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| 75 slpm (N2 and Rare Gas), 50 slpm (H2), 9 slpm (Xe) |
| PS4-MT15-R-1 | Rare Gas Purifier | 110-120V |
| PS4-MT15-N-1 | Nitrogen Purifier | 110-120V |
| PS4-MT15-H-1 | Hydrogen Purifier | 110-120V |
| PS4-MT15-R-2 | Rare Gas Purifier | 220-240V |
| PS4-MT15-N-2 | Nitrogen Purifier | 220-240V |
| PS4-MT15-H-2 | Hydrogen Purifier | 220-240V |
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| Options |
| PS4-APIMS | APIMS cerification to 1 ppb |
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| Spare Parts (Replacement cartridges are field replaceable) |
| PF4-C3-R-1 | Rare Gas 3000 Cartridge | 110-120V |
| PF4-C3-N-1 | Nitrogen 3000 Cartridge | 110-120V |
| PF4-C3-H-1 | Hydrogen 3000 Cartridge | 110-120V |
| PF4-C3-R-2 | Rare Gas 3000 Cartridge | 220-240V |
| PF4-C3-N-2 | Nitrogen 3000 Cartridge | 220-240V |
| PF4-C3-H-2 | Hydrogen 3000 Cartridge | 220-240V |
| PF4-C15-R-1 | Rare Gas 15000 Cartridge | 110-120V |
| PF4-C15-N-1 | Nitrogen 15000 Cartridge | 110-120V |
| PF4-C15-H-1 | Hydrogen 15000 Cartridge | 110-120V |
| PF4-C15-R-2 | Rare Gas 15000 Cartridge | 220-240V |
| PF4-C15-N-2 | Nitrogen 15000 Cartridge | 220-240V |
| PF4-C15-H-2 | Hydrogen 15000 Cartridge | 220-240V |
APIMS Validation
The PS4 MonoTorr has been qualified using an atmospheric pressure ionization mass spectrometer (APIMS).
Upstream impurities fluctuating in the low-ppm range are immediately reduced to ppt levels.
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