Rare Gas/Nitrogen Purifier - PS3-MT3

MonoTorr Phase I Gas Purifier

Research has shown that gas purification ensures consistent and repeatable process performance for semiconductor device manufacturing. Point of Use Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination.
The MonoTorr purifiers provide essential purification for Nitrogen and Rare Gases at flow rates up to 5 slpm. The all metal getter material removes impurities to < 1 ppb.


  • Fully automatic controller with fault protection and audible alarm
  • 0,003 µm stainless steel particle filter
  • Low cost of ownership
  • Replaceable cartridge

PS3-MT3 Outlet Performance
Gases PurifiedImpurities RemovedOutlet Performance
N2H2O, O2, CO, CO2, H2, CH4< 1 ppb
He, Ar, XeH2O, O2, CO, CO2, H2, CH4, N2< 1 ppb

Ordering Information
Part NumberGas PurifiedPower
PS3-MT3-R-1He, Ar, Xe110-120V
PS3-MT3-R-2He, Ar, Xe220-240V
BYPS-3Bypass assembly
PS3-APIMSAPIMS certification to 1 ppb
Spare Parts (Replacement cartridges are field replacable)
PF3-C3-R-1He, Ar, Xe110-120V
PF3-C3-R-2He, Ar, Xe220-240V
© 2021 Rainer Lammertz