The Ammonia MegaTorr Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. These automatically regenerable Ammonia Purifiers use an adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H2O and O2 are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified Nitrogen and low concentration Hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.