Ammonia Bulk Gas Purifier - PS21

Ammonia Bulk Gas Purifier - PS21

The Ammonia MegaTorr Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. These automatically regenerable Ammonia Purifiers use an adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H2O and O2 are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified Nitrogen and low concentration Hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.

Standard Features

  • Fully Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • Electric Gas Preheaters
  • Ammonia Detection Sensor
  • Vented Cabinet Purge
  • Closed-Loop Temperature Controls
  • All Metal Enclosure with Doors
  • Regeneration Blending Station
  • Over Pressurization Safety System
  • < class="lired">High Temperature Hardware Interlock

Optional Features

  • Inlet and outlet isolation valves
  • Mass Flow Meter
  • Inlet and Outlet Pressure Transducers
  • Auto or Manual Bypass.
  • Ultrafine 0.003 micron Particle Filter
  • Separate Control Power
  • MODBUS Data communication port
  • Uninterruptible Power Supply (UPS)

PS21 Performance
Gases PurifiedImpurities RemovedOutlet Performance
NH3H2O, O2, CO2< 1 ppb

PS21 Specifications
ModelMaximum Flow
Maximum Pressure Drop
Dimensions (cm)Weight
PS21-MGS10 - PS21-MGS2010 - 200.71378040<110
PS21-MGS30 - PS21-MGS6030 - 600.71688761<180

© 2021 Rainer Lammertz