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Fluorinated Gas Purifiers
Impurities removed can include H2O, CO, CO2, O2, H2 and NMHC. Impurities in these gases are reduced to less than 1 part-per-billion.



Model Number Configuration (Example MC1-905FV)
MC1 -905 -FV
Model Size Media Options

Model Size
Model Nominal Flow(1) Max Flow(1) Max PSIG Specifications
MC1 0,5 slpm 5 slpm 1000 psig Datasheet
MC50 1,5 slpm 10 slpm 1000 psig Datasheet
MC190 5 slpm 50 slpm 250 psig Datasheet
MC200 5 slpm 50 slpm 250 psig Datasheet
MC400 9 slpm 60 slpm 250 psig Datasheet
MC450 10 slpm 75 slpm 250 psig Datasheet
MC500 12 slpm 100 slpm 250 psig Datasheet
MC1500 40 slpm 250 slpm 250 psig Datasheet
MC3000 80 slpm 500 slpm 250 psig Datasheet
MC4500 200 slpm 1000 slpm 250 psig Datasheet
MC9000 300 slpm 1000 slpm 250 psig Datasheet
FT400 10 slpm 75 slpm 500 psig Datasheet
HP190 5 slpm 50 slpm 1000 psig Datasheet
HP400 9 slpm 60 slpm 1000 psig Datasheet
SP70 1.5 slpm 20 slpm (2) 3000 psig Datasheet
SP300 10 slpm 100 slpm (2) 3000 psig Datasheet
SP600 15 slpm 200 slpm (2) 3000 psig Datasheet
PG1 10 slpm 15 slpm 250 psig Datasheet
(1) Flowrates stated without optional filters or valves
(2) Max flowrate increases between 2,000 - 3.000 psig (see specification)
Media Types for Corrosive and Specialty Gases
Media Gases Purified Impurities Removed Outlet Performance
905 C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6 H2O, O2, CO, CO2, H2, NMHC< 1 ppb < 1 ppb

Options
Option Description Comments
F 0,003 μm filter option 2 μm filter standard
HF 0,003 μm high-flow filter option For use with MC4500 model only
V Inlet and outlet valves 1/4" Manual diaphragm. (Not available on SP models.)

© 2025 Rainer Lammertz