Model Size
Model |
Nominal Flow(1) |
Max Flow(1) |
Max PSIG |
Specifications |
MC1 |
0,5 slpm |
5 slpm |
1000 psig |
Datasheet |
MC50 |
1,5 slpm |
10 slpm |
1000 psig |
Datasheet |
MC190 |
5 slpm |
50 slpm |
250 psig |
Datasheet |
MC200 |
5 slpm |
50 slpm |
250 psig |
Datasheet |
MC400 |
9 slpm |
60 slpm |
250 psig |
Datasheet |
MC450 |
10 slpm |
75 slpm |
250 psig |
Datasheet |
MC500 |
12 slpm |
100 slpm |
250 psig |
Datasheet |
MC1500 |
40 slpm |
250 slpm |
250 psig |
Datasheet |
MC3000 |
80 slpm |
500 slpm |
250 psig |
Datasheet |
MC4500 |
200 slpm |
1000 slpm |
250 psig |
Datasheet |
MC9000 |
300 slpm |
1000 slpm |
250 psig |
Datasheet |
|
FT400 |
10 slpm |
75 slpm |
500 psig |
Datasheet |
|
HP190
|
5 slpm |
50 slpm |
1000 psig |
Datasheet |
HP400 |
9 slpm |
60 slpm |
1000 psig |
Datasheet |
|
SP70 |
1.5 slpm |
20 slpm (2) |
3000 psig |
Datasheet |
SP300 |
10 slpm |
100 slpm (2) |
3000 psig |
Datasheet |
SP600 |
15 slpm |
200 slpm (2) |
3000 psig |
Datasheet |
|
PG1 |
10 slpm |
15 slpm
|
250 psig
|
Datasheet |
(1) Flowrates stated without optional filters or valves
(2) Max flowrate increases between 2,000 - 3.000 psig (see specification)
| |
Media Types for Corrosive and Specialty Gases
Media |
Gases Purified |
Impurities Removed |
Outlet Performance |
905 |
C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6 |
H2O, O2, CO, CO2, H2, NMHC< 1 ppb |
< 1 ppb |
Options
Option |
Description |
Comments |
F |
0,003 μm filter option |
2 μm filter standard |
HF |
0,003 μm high-flow filter option |
For use with MC4500 model only |
V |
Inlet and outlet valves |
1/4" Manual diaphragm. (Not available on SP models.) |
|