Gases to be purified
Info:
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Corrosive and Specialty Gas Purifiers
Impurities removed are H2O and metals to < 1 ppb .
Model Number Configuration (Example MC1-302FV)
| MC1 |
-302 |
-FV |
| Model Size |
Media |
Options |
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Model Size
Media Types for Corrosive and Specialty Gases
| Media |
Gases Purified |
Impurities Removed |
Outlet Performance |
| 302 |
B2H6, BCl3, BF3, CClH3, Cl2, CO2, DCS, GeCl4, GeH4, H2S, H2Se, HBr, HCl, N2O, NF3, NO, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2 |
H2O, Metals |
< 1 ppb |
Options
| Option |
Description |
Comments |
| F |
0,003 μm filter option |
2 μm filter standard |
| HF |
0,003 μm high-flow filter option |
For use with MC4500 model only |
| V |
Inlet and outlet valves |
1/4" Manual diaphragm. (Not available on SP models.) |
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Nitrogen >>