Oxygen Bulk Gas Purifier - PS6


The MegaTorr Oxygen Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS6 series uses catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, CH4, H2, and H2O are reduced to below parts per billion (ppb) levels.
Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 in the oxidizing catalyst vessel to form CO2 and H2O which are then removed in the ambient temperature downstream adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified oxygen at elevated temperatures.

Standard Features:
  • Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • System Alarms
  • Gas to Gas Heat Exchanger
  • Electric Gas Preheaters
  • Closed-Loop Temperature Controls
  • All Metal Cabinet with Doors
  • High Temperature Hardware Interlock
  • Over Pressurization Safety Relief System
Optional Features:
  • Inlet & Outlet Isolation Valves
  • Mass flow meter
  • Inlet & Outlet Pressure Transducers
  • Instrument Air Management System
  • Air Cooled Heat Exchanger
  • Auto or Manual Bypass
  • Ultrafine 0.003 micron Particle Filter
  • Separate Control Power
  • MODBUS Data Communication Port

PS6 Performance
Gases PurifiedImpurities RemovedOutlet Performance
O2H2O, CO, CO2, H2, CH4< 1 ppb

PS7 Specifications
ModelMaximum Flow
(Nm3/hr)
Average Power
Consumption (kW)
Maximum Pressure Drop
(bar)
Dimensions (cm)Weight
(kg)
HWD
PS6-MGT15-O151,40,71938984<600
PS6-MGT30-O302,30,71938984<600
PS6-MGT60-O603,20,71938984<600
PS6-MGT100-O1005,90,7193132135<600
PS6-MGT200-O2009,10,7193132135<998

© 2017 Rainer Lammertz