The MegaTorr Oxygen Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS6 series uses catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO_2, CH₄, H₂, and H₂O are reduced to below parts per billion (ppb) levels.

Hydrocarbons (CH₄), CO and H₂ react at elevated temperatures with O₂ in the oxidizing catalyst vessel to form CO₂ and H₂O which are then removed in the ambient temperature downstream adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified oxygen at elevated temperatures.