PS22 CDA (Clean Dry Air) Purifiers


PS22 CDA Gas Purifier

The CDA MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.
The PS22 CDA Purifiers use ambient temperature adsorption processes designed specifically to provide UHP CDA for lithography, inspection, or metrology semiconductor applications. Outlet impurity levels for CO2, H2O and trace impurities including TOC’s (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts per billion (ppb) levels with these Clean Dry Air Purifiers.
Standard Features
  • Automated Microprocessor Controller
  • HMI (Human Machine Interface)
  • System Alarms
  • Electric Gas Preheaters
  • Closed-Loop Temperature Controls
  • All Metal Cabinet with Doors
  • High Temperature Hardware Interlock
  • Over Pressurization Safety Relief System
Optional Features:
  • Inlet & Outlet Isolation Valves
  • Mass flow meter with 4-20mA Output
  • Inlet & Outlet Pressure Transducers
  • Auto or Manual Bypass
  • Instrument Air Management System
  • Ultrafine 0.003 micron particle filter
  • Separate control power

PS22 Performance
Gases PurifiedImpurities RemovedOutlet Performance
CDAH2O, CO2< 100 ppt
Organics, Acids, Bases, Refractory Compounds< 10 ppt

PS22 Specifications
ModelMaximum Flow
(Nm3/hr)
Maximum Pressure Drop
(bar)
Dimensions (cm)Weight
(kg)
HWD
PS22-MGT10 - PS22-MGT3010 - 300.71388040<110
PS22-MGT40 - PS22-MGT6040 - 600.71688761<180
PS22-MGT90 - PS22-MGT12090 - 1200.716510070<300
PS22-MGT200 - PS22-MGT300200 - 3001193132135<1500
PS22-MGT400 - PS22-MGT900400 - 9001209148196<2300
PS22-MGT1000 - PS22-MGT14001000 - 14001239191236<2300
PS22-MGT1500 - PS22-MGT30001500 - 30001264252262<5600
PS22-MGT4000 - PS22-MGT50004000 - 50001264252262<6000
PS22-MGT6000 - PS22-MGT100006000 - 100001267252267<10500

© 2017 Rainer Lammertz