Arsine or Phosphine Gas Purification
Impurities removed include H2O, and O2. Impurities in these gases are reduced to less than 1 part-per-billion.


Model Number Configuration (Example MC50-402FV)
MC50 -402 -FV
Model Size Media Options

Model Size
Model Average Flow (slpm) Max Flow (slpm) Max Pressure (PSIG) Specification Drawing
MC1 0,5 slpm 5 slpm 1000 psig Datasheet Drawing
MC50 1,5 slpm 10 slpm 1000 psig Datasheet Drawing
MC190 5 slpm 50 slpm 250 psig Datasheet Drawing
MC200 5 slpm 50 slpm 250 psig Datasheet Drawing
MC400 9 slpm 60 slpm 250 psig Datasheet Drawing
MC450 10 slpm 75 slpm 250 psig Datasheet Drawing
MC500 12 slpm 100 slpm 250 psig Datasheet Drawing
MC700 25 slpm 120 slpm 250 psig Datasheet Drawing
MC1500 40 slpm 250 slpm 250 psig Datasheet Drawing
MC3000 80 slpm 500 slpm 250 psig Datasheet Drawing
Special 'U' shaped Manifold
PG1 10 slpm 15 slpm 250 psig Datasheet Drawing

Media Types for Arsine Gas
Media Gases Purified Impurities Removed Regenerable
502 PH3, AsH3 H2O, O2 < 1 ppb No

Options
Option Description Comments
F 0.003 μm filter option If not ordered, 2 µm filter standard
V Inlet and outlet valves 1/4" or 1/2" Manual diaphragm Valves

© 2017 Rainer Lammertz